Three types of SMUs are available:
HRSMU (high resolution SMU)
Force and measure: up to ±100 V or ±100 mA.
Maximum output power: 2 W.
Minimum current measurement range: 10 pA with 1 fA resolution.
Only the 4156B has HRSMUs. The 4156B has four HRSMUs.
MPSMU (medium power SMU)
Force and measure: up to ±100 V or ±100 mA.
Maximum output power: 2 W.
The 4155B has four MPSMUs, and the 41501A/B can be equipped with either two MPSMUs or one HPSMU.
HPSMU (high power SMU)
Force and measure: up to ±200 V or ±1 A.
Maximum output power: 20 W.
Only the 41501A/B has HPSMU. The 41501A/B can be equipped with either two MPSMUs or one HPSMU.
HPSMUs and HRSMUs can be connected to test devices by Kelvin connection.
Each SMU has a compliance feature that limits output voltage or current to prevent damage to your devices. When the SMU forces voltage, you can specify I compliance. When the SMU forces current, you can specify V compliance.
For details about the compliance setting range and resolution, see “Compliance” in Chapter 3.
The following figures and tables show the output and measurement ranges of each SMU type.
